“As a leading material supplier to the semiconductor industry, our ability to deliver advanced lithography materials is critical, especially as the industry moves down below the 45nm node,” said Dr. Dominic Yang, Business Unit Director, Microelectronic Technologies.
Rohm and Haas Invests $60 Million in Immersion Lithography System
MARLBOROUGH,
MA – Rohm and Haas Electronic Materials will invest $60 million in leading-edge
lithography equipment to support its extensive research and development of
advanced 193 nanometer (nm) photoresist and anti-reflective coatings used in
the manufacture of semiconductor devices.
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